In this particular paper, The brand new lapping slurry and polishing slurry are launched. As well as deliquescence degree of CLBO is fallen to most affordable. A different working engineering is likewise adopted. Just after tough polishing, the focus of extremely-precision polishing slurry is improved thoroughly. So does the ultra-precision sprucing speed, and also the wiping speed is faster than the deliquescence velocity. The CLBO crystal area roughness can realize 1nm and retain the floor high quality well. Obtain by your institution
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We summarized the current improvement status of your substantial-energy DUV laser both within the wavelength of FHG in the one-μm laser and at 193 nm. The latest growth from the good-state/fiber laser, and also the nonlinear optical crystals, prompts not just the normal power but in addition the beam high quality (coherence) with the DUV lasers to an unprecedented degree.
For instance, The existing concave OC could get replaced by a plane mirror which could mitigate the facility density about the surface area of M1 and the diamond. Additionally, making use of large injury threshold coatings for M1 and diamond would also Enhance the output power with no damages. Then, the NIR laser in the 2nd Stokes wavelength could be significant ample, in addition to its good beam high quality, to crank out the ultimate DUV laser at 193 nm having a substantial ordinary electricity.
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LBO can be an excellent nonlinear crystal which is usually placed on the SHG within the NIR for the inexperienced. The DUV laser is usually understood by two levels of SFG within the LBO crystals because there is not any phase-matching angle for LBO to transform the green laser at 515 nm or 532 nm for the DUV specifically by SHG [sixteen]. Recently, the NSBBF crystal has also shown its prospective to obtain a higher conversion efficiency from 532 nm to 266 nm. The wander-off angle and deff with the NSBBF are Just about similar to Those people of CLBO [17].
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During the scientific and industrial purposes, the beam high-quality of the DUV laser is also an essential parameter. Especially, the beam quality of the DUV laser considerably influences the laser machining final results. The beam quality in the DUV laser is determined by that of the elemental laser along with the crystal for your frequency conversion. Lately, a superior-electrical power DUV laser (>ten W) at 258 nm was documented having a beam high-quality of M2 < 1.five, which was created by FHG of the Yb:YAG laser at 1030 nm utilizing the CLBO crystal [13]. This laser would bring on a greater laser machining consequence in comparison with the past DUV lasers with larger M2.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics of your Nd:YAG essential laser wavelength. To be able to boost the injury threshold, minimal CLBO surface roughness, by extremely-precision machining, is required. Since the CLBO crystal has straightforward hydroscopic reaction and micro scratches in machining, extremely-exact machining from the CLBO crystal is a complicated complex issue.
The beam profile proven in Figure 7b shown a good beam top quality as one of many deserves of Raman laser, which might be beneficial to create a 193-nm DUV laser with a top quality beam.
Its UV absorption edge reaches a hundred and eighty nm. The successful nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about two times as huge as that of KDP. CLBO crystals is often grown in the stoichiometric soften with reduced viscosity.
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